LEADER 05924nam 2200709 a 450 001 9910784606703321 005 20230829001316.0 010 $a1-281-86739-X 010 $a9786611867393 010 $a1-60119-887-6 010 $a1-86094-920-7 035 $a(CKB)1000000000398169 035 $a(StDuBDS)AH24683080 035 $a(SSID)ssj0000072982 035 $a(PQKBManifestationID)11116048 035 $a(PQKBTitleCode)TC0000072982 035 $a(PQKBWorkID)10102725 035 $a(PQKB)11294018 035 $a(WSP)0000P355 035 $a(MiAaPQ)EBC1681718 035 $a(EXLCZ)991000000000398169 100 $a20061108d2006 uy 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt 182 $cc 183 $acr 200 10$aSmart MEMS and sensor systems$b[electronic resource] /$fElena Gaura & Robert Newman, with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro 210 $aLondon $cImperial College$d2006 215 $a1 online resource (539 p. )$cill 300 $aBibliographic Level Mode of Issuance: Monograph 311 $a1-86094-493-0 320 $aIncludes bibliographical references and index. 327 $aPreface -- ch. 1. Markets and applications. 1.1. Technology at crossroads. 1.2. The present - MEMS in the news. 1.3. The past - great expectations. 1.4. The Future - maturity and pervasive applications. 1.5. Drivers for progress. 1.6. Progress - device improvement. 1.7. Progress - device integration. 1.8. Smart MEMS - the research agenda. 1.9. Structure of the book -- ch. 2. Microfabrication technologies. 2.1. Introduction. 2.2. Passive components. 2.3. Sensing components. 2.4. Actuating components. 2.5. Materials and growth. 2.6. Fabrication techniques. 2.7. Conclusions -- ch. 3. Sensor electronics. 3.1. Introduction. 3.2. Functions of a sensor system. 3.3. Analogue and digital design options. 3.4. Digital signal processing. 3.5. Interface configurations for different transducer types. 3.6. Integration. 3.7. Design for power awareness. 3.8. Conclusion -- ch. 4. Sensor signal enhancement. 4.1. Errors in sensor systems and measurement quality (non-linearity, cross-sensitivity, offset, parameter drift). 4.2. Sensor calibration and compensation - techniques and examples. 4.3. System design choices for compensation - closed loop configurations and other designs. 4.4. Summing up on sensor calibration and compensation -- ch. 5. Case study: control systems for capacitive inertial sensors. 5.1. Introduction. 5.2. Open loop accelerometer. 5.3. Closed loop accelerometer. 5.4. Conclusions -- ch. 6. Case study: adaptive optics and smart VLSI/MEMS systems. 6.1. Introduction. 6.2. Adaptive optics and MEMS systems. 6.3. Operational principles. 6.4. Device implementation. 6.5. Closed-loop adaptive optical system. 6.6. Conclusions and future trends -- ch. 7. Artificial intelligence techniques for microsensors identification and compensation. 7.1. Artificial neural networks: what they are and how they are used for microsensor control and identification. 7.2. Open loop, neural transducer prototype for static/low frequency applications. 7.3. Closed-loop neural network controlled accelerometer. 7.4. The neural network non-linear gain controller. 7.5. Micromachined sensor identification using neural networks. 7.6. Concluding remarks -- ch. 8. Smart, intelligent and cogent MEMS based sensors. 8.1. Introduction. 8.2. Smart, intelligent and cogent sensors - what do the terms mean. 8.3. What and where is the added value brought by intelligence? 8.4. ANNs and MEMS. 8.5. AI for MEMS intelligence. 8.6. 'Cogent' sensors - fault detection case study. 8.7. Conclusion -- ch. 9. Sensor arrays and networks. 9.1. Potential of sensor arrays. 9.2. Node design. 9.3. An architectural history of sensor arrays and networks. 9.4. Systems design issues. 9.5. Network technology and topology. 9.6. Conclusion -- ch. 10. Wireless and Ad hoc sensor networks. 10.1. Sensor network applications. 10.2. System designers' role. 10.3. Design assumptions for Ad hoc networks. 10.4. Distributed system design philosophy. 10.5. Network design considerations. 10.6. Layered model. 10.7. Sensor network operating environments. 10.8. Application services. 10.9. Proposed sensor support system architecture. 10.10. Conclusions -- ch. 11. Realising the dream - a case study. 11.1. Introduction. 11.2. The mission. 11.3. Initial rough design. 11.4. Sensor technology. 11.5. Deployment. 11.6. Operation, control and communication. 11.7. Querying the array. 11.8. A cogent sensor. 11.9. A world of applications. 330 $aMEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. This book presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a systems perspective. 606 $aMicroelectromechanical systems 606 $aMicroelectromechanical systems 606 $aSmart structures 606 $aElectrical & Computer Engineering$2HILCC 606 $aEngineering & Applied Sciences$2HILCC 606 $aElectrical Engineering$2HILCC 608 $aElectronic books.$2lcsh 615 0$aMicroelectromechanical systems. 615 0$aMicroelectromechanical systems 615 0$aSmart structures 615 7$aElectrical & Computer Engineering 615 7$aEngineering & Applied Sciences 615 7$aElectrical Engineering 676 $a621.3 700 $aGaura$b Elena$0772021 701 $aNewman$b Robert M$032189 701 $aKraft$b Michael$0847187 701 $aFlewitt$b Andrew$01499093 701 $aLima Monteiro$b Davies William de$f1972-$01499094 801 0$bUk 801 1$bUk 801 2$bStDuBDSZ 801 2$bUkPrAHLS 906 $aBOOK 912 $a9910784606703321 996 $aSmart MEMS and sensor systems$93724916 997 $aUNINA