LEADER 05578nam 2200661Ia 450 001 9910784545503321 005 20190510200729.0 010 $a1-280-72878-7 010 $a9786610728787 010 $a0-08-046629-X 035 $a(CKB)1000000000365141 035 $a(EBL)281941 035 $a(OCoLC)171131171 035 $a(SSID)ssj0000287758 035 $a(PQKBManifestationID)11208302 035 $a(PQKBTitleCode)TC0000287758 035 $a(PQKBWorkID)10371987 035 $a(PQKB)11488137 035 $a(MiAaPQ)EBC281941 035 $a(PPN)13926194X 035 $a(EXLCZ)991000000000365141 100 $a20061228d2006 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$a4M 2006$b[electronic resource] $esecond International Conference on Multi-Material Micro Manufacture : 20-22 September 2006, Grenoble, France /$fedited by Wolfgang Menz, Stefan Dimov and Bertrand Fillon ; organised by FP6 4M Network of Excellence ; sponsored by The European Commission 205 $a1st ed. 210 $aOxford $cElsevier$d2006 215 $a1 online resource (445 p.) 300 $aDescription based upon print version of record. 311 $a0-08-045263-9 320 $aIncludes bibliographical references and index. 327 $aFront Cover; Second International Conference on Multi-Material Micro Manufacture; Copyright Page; Welcome Proceedings; 4M2006 Conference Committee; Sponsors; A roadmapping study in Multi-Material Micro Manufacture; Abstract; Keywords; 1. Introduction; 2. Study Scope; 3. Methodology; 4. Results: Applications; 5. Results: Technologies; 6. Conclusions; Acknowledgements; References; Table of Contents; Keynote Papers; Lab on a Chip : advances in packaging for MEMS and Lab on a Chip; Abstract; Keywords; Introduction; 1. Several representative Constraints in projects using microfluidic 327 $a2 Standards wafer level Solutions3 Specific solutions for low temperature sealing at the CEA Leti; 4 Conclusions; Acknowledgements; Reference; Micro- and nano- structuring using ion beams; Abstract; Keywords; 1. Introduction; 2. Ion-beam interactions with materials; 3. Ion projection technique; 4. Ion projection maskless direct nanopatterning; 5. Ion projection maskless direct nanopatterning; 7. Conclusion and Outlook; References; Micromoulding - precision processing for controlled products; Abstract; Keywords; 1. Introduction; 2. Extreme processing conditions; 3. In-process measurements 327 $a4. Product evaluations5. Materials; 6. Process technology; 6. Concluding comments; Acknowledgements; 7. References; Automatic nanohandling station inside a scanning electron microscope; Abstract; Keywords; 1. Introduction; 2. Setup of the Nanohandling Cell; 3. Control System of the Robot Cell; 4. Real-Time Visual Feedback in SEM; 5. Automatic Handling of TEM Lamellae; 6. Stereoscopic Depth Detection in an SEM; 7. Setup of the Nanocharacterization station; 8. Nanoindentation and CNT Characterization; Acknowledgments; References; Recent evolution of electrical discharge machining; Abstract 327 $aKeywords1. Introduction; 2. Finish machining by EDM; 3. Metal surface modification; 4. EDM of insulating materials; 5. Micro EDM process; 6. Conclusions; Acknowledgments; Reference; Major FP6 Projects; A dynamics-driven approach to precision machines design for micro-manufacturing and its implementation perspectives; Abstract; Keywords; 1. Introduction; 2. Tool-workpiece loops and machine tool vibration; 3. Stiffness, Mass and damping; 4. Design processes of the precision machine; 5. Conclusions; Acknowledgements; References 327 $aA new technology platform for fully integrated polymer based micro optical fluidic systemsAbstract; Keywords; 1. Introduction; 2. Micro Optical Concepts; 3. Micro Fluidic Concepts; 5. Fabrication Technologies; 6. Conclusion; Acknowledgements; References; Market Studies on 4M Technologies and Applications; Market forecasts for roll-to-roll electronics manufacturing; Abstract; Keywords; 1. Introduction; 2. Silicon versus Roll-to-Roll Electronics; 3. New Markets for Roll to Roll Electronics Manufacturing; 4. Technical Path to Roll to Roll Manufacturing 327 $a5. Maintaining European Union Industry and Growth 330 $aThis work covers the latest state-of-the-art research results from leading European researchers in advanced micro technologies for batch processing of metals, polymers, and ceramics, and the development of new production platforms for micro systems-based products.These contributions are from leading authors at a platform endorsed and funded by the European Union R&D community, as well as leading universities, and independent research and corporate organizations. This comprehensive collection of indexed and peer reviewed articles contains a CD with search functionality.* Contains au 606 $aMicrotechnology$vCongresses 606 $aMicroelectromechanical systems$vCongresses 615 0$aMicrotechnology 615 0$aMicroelectromechanical systems 676 $a670.42 701 $aMenz$b W$g(Wolfgang)$0971799 701 $aDimov$b S. S.$f1959-$01528733 701 $aFillon$b Bertrand$01528734 712 02$a4M Network of Excellence (Sixth Framework Programme) 712 12$aInternational Conference on Multi-Material Micro Manufacture 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910784545503321 996 $a4M 2006$93772570 997 $aUNINA