LEADER 02823nam 2200601 450 001 9910781033603321 005 20230125224246.0 010 $a1-60783-978-4 035 $a(CKB)2550000000012446 035 $a(EBL)583647 035 $a(OCoLC)659579814 035 $a(SSID)ssj0000410915 035 $a(PQKBManifestationID)11260756 035 $a(PQKBTitleCode)TC0000410915 035 $a(PQKBWorkID)10353699 035 $a(PQKB)11213597 035 $a(Au-PeEL)EBL583647 035 $a(CaPaEBR)ebr10393281 035 $a(CaBNVSL)mat09100728 035 $a(IEEE)9100728 035 $a(MiAaPQ)EBC583647 035 $a(EXLCZ)992550000000012446 100 $a20200729d2010 uy 101 0 $aeng 135 $aurcn||||||||| 181 $ctxt 182 $cc 183 $acr 200 10$aAcoustic wave and electromechanical resonators $econcept to key applications /$fHumberto Campanella 210 1$aNorwood, Massachusetts. :$cArtech House,$dİ2010. 210 2$a[Piscataqay, New Jersey] :$cIEEE Xplore,$d[2010] 215 $a1 online resource (363 p.) 225 1 $aIntegrated microsystems series 300 $aIncludes index. 311 $a1-60783-977-6 320 $aIncludes bibliographical references and index. 327 $a1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. 330 $aThis groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin. 410 0$aArtech House integrated microsystems series. 517 3 $aAcoustic wave & electromechanical resonators 606 $aAcoustic surface wave devices 606 $aElectric resonators 615 0$aAcoustic surface wave devices. 615 0$aElectric resonators. 676 $a621.381 700 $aCampanella$b Humberto$01516580 801 0$bCaBNVSL 801 1$bCaBNVSL 801 2$bCaBNVSL 906 $aBOOK 912 $a9910781033603321 996 $aAcoustic wave and electromechanical resonators$93753142 997 $aUNINA