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101 0 $aeng
135   $aurcn|||||||||
181   $ctxt
182   $cc
183   $acr
200 10$aPlasma processing of materials$b[electronic resource] $escientific opportunities and technological challenges /$fPanel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council
210   $aWashington, D.C. $cNational Academy Press$d1991
215   $a1 online resource (87 p.) 
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-309-04597-5 
606   $aPlasma engineering
606   $aMicroelectronics$xMaterials$xEffect of radiation on
606   $aSurfaces (Technology)
615  0$aPlasma engineering.
615  0$aMicroelectronics$xMaterials$xEffect of radiation on.
615  0$aSurfaces (Technology)
676   $a621.044
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906   $aBOOK
912   $a9910778507903321
996   $aPlasma processing of materials$93805764
997   $aUNINA