LEADER 01480nam  2200445   450 
001 9910743219703321
005 20220925015425.0
010   $a981-16-9442-7
010   $a981-16-9443-5
010   $a981-16-9443-5
035   $a(MiAaPQ)EBC6884900
035   $a(Au-PeEL)EBL6884900
035   $a(CKB)21078949600041
035   $a(PPN)260826340
035   $a(EXLCZ)9921078949600041
100   $a20220925d2022      uy             0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aMicromachined circuits and devices $emicrowave to sub-millimeter applications /$fShiban Kishen Koul and Sukomal Dey
210  1$aSingapore :$cSpringer,$d[2022]
210  4$dİ2022
215   $a1 online resource (386 pages)
225 1 $aLecture Notes in Electrical Engineering ;$vVolume 859
311 08$aPrint version: Koul, Shiban Kishen Micromachined Circuits and Devices Singapore : Springer Singapore Pte. Limited,c2022 9789811694424 
410  0$aLecture notes in electrical engineering ;$vVolume 859.
606   $aMicroelectromechanical systems
615  0$aMicroelectromechanical systems.
676   $a621.381
700   $aKoul$b Shiban K.$0726856
702   $aDey$b Sukomal
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910743219703321
996   $aMicromachined circuits and devices$93560241
997   $aUNINA