LEADER 03442nam 22006255 450 001 9910741197303321 005 20230814094059.0 010 $a981-19-8975-3 024 7 $a10.1007/978-981-19-8975-9 035 $a(MiAaPQ)EBC30697459 035 $a(Au-PeEL)EBL30697459 035 $a(DE-He213)978-981-19-8975-9 035 $a(PPN)272269360 035 $a(EXLCZ)9927982362300041 100 $a20230814d2023 u| 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aFundamental Research on Nanomanufacturing$b[electronic resource] /$fedited by Bingheng Lu 205 $a1st ed. 2023. 210 1$aSingapore :$cSpringer Nature Singapore :$cImprint: Springer,$d2023. 215 $a1 online resource (140 pages) 225 1 $aReports of China?s Basic Research,$x2731-8915 311 08$aPrint version: Lu, Bingheng Fundamental Research on Nanomanufacturing Singapore : Springer,c2023 9789811989742 320 $aIncludes bibliographical references and index. 327 $aProject Overview -- Research Situation -- Nano/Sub-Nanometer Precision Manufacturing -- Consistent Manufacturing of Macro,Micro and Nano Cross-Scale Structures -- Cross-Scale Integrated Manufacturing of Nanostructures and Devices -- New Methods of Laser Micro-Nanomanufacturing -- Other Nanomanufacturing Principles and Technological Breakthroughs -- Outlook. 330 $aThis book explores new principles and methods of nanomanufacturing based on physical/chemical effects through interdisciplinary research and reveals surface/interface effects and scale effects in processing, forming, modification, and cross-scale manufacturing at nanoscale and nanoscale precision. It is a summary of a major research project in the field of engineering and materials science of China, the ?Fundamental Research of Nanomanufacturing?. It clarifies the evolution mechanism of material structure, establishes the accurate characterization and measurement method of nanomanufacturing process, develops some original nanomanufacturing processes and equipment, and provides theoretical basis for realizing the consistent batch process of nanomanufacturing. It reports a series of research breakthroughs in principles and methods of nano-precision manufacturing, nanoscale structure fabrication as well as efficient and multiscale fabrication of large area nanostructures. 410 0$aReports of China?s Basic Research,$x2731-8915 606 $aNanotechnology 606 $aIndustrial engineering 606 $aProduction engineering 606 $aNanoelectromechanical systems 606 $aNanoengineering 606 $aIndustrial and Production Engineering 606 $aNanoscale Devices 606 $aNanoscale Design, Synthesis and Processing 615 0$aNanotechnology. 615 0$aIndustrial engineering. 615 0$aProduction engineering. 615 0$aNanoelectromechanical systems. 615 14$aNanoengineering. 615 24$aIndustrial and Production Engineering. 615 24$aNanoscale Devices. 615 24$aNanoscale Design, Synthesis and Processing. 676 $a620.5 702 $aLu$b Bingheng 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910741197303321 996 $aFundamental Research on Nanomanufacturing$93553014 997 $aUNINA