LEADER 03002nam 22005415 450 001 9910736986403321 005 20230802084555.0 010 $a3-658-41041-8 024 7 $a10.1007/978-3-658-41041-4 035 $a(MiAaPQ)EBC30673958 035 $a(Au-PeEL)EBL30673958 035 $a(DE-He213)978-3-658-41041-4 035 $a(PPN)272271616 035 $a(EXLCZ)9927906779600041 100 $a20230802d2023 u| 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aSilicon Semiconductor Technology$b[electronic resource] $eProcessing and Integration of Microelectronic Devices /$fby Ulrich Hilleringmann 205 $a1st ed. 2023. 210 1$aWiesbaden :$cSpringer Fachmedien Wiesbaden :$cImprint: Springer Vieweg,$d2023. 215 $a1 online resource (271 pages) 311 08$aPrint version: Hilleringmann, Ulrich Silicon Semiconductor Technology Wiesbaden : Springer Fachmedien Wiesbaden GmbH,c2023 9783658410407 327 $aWafer fabrication -- Thermal oxidation -- Lithography -- Etching technology -- Doping techniques -- Chemical and Physical Deposition -- Metallization and Contacts. 330 $aThe book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer?s view. The Content Wafer fabrication Thermal oxidation Lithography Etching technology Doping techniques Chemical and Physical Deposition Metallization and Contacts About the Author Prof. Dr.-Ing. Ulrich Hilleringmann has been teaching semiconductor technology, microelectromechanical systems, sensor technology and optoelectronic system integration since 1989. 606 $aElectronics 606 $aElectronic circuits 606 $aSemiconductors 606 $aElectronics and Microelectronics, Instrumentation 606 $aElectronic Circuits and Systems 606 $aSemiconductors 615 0$aElectronics. 615 0$aElectronic circuits. 615 0$aSemiconductors. 615 14$aElectronics and Microelectronics, Instrumentation. 615 24$aElectronic Circuits and Systems. 615 24$aSemiconductors. 676 $a621.38152 700 $aHilleringmann$b Ulrich$01381761 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910736986403321 996 $aSilicon Semiconductor Technology$93424601 997 $aUNINA