LEADER 03187nam 22006975 450 001 9910726273403321 005 20230518192210.0 010 $a3-031-29628-1 024 7 $a10.1007/978-3-031-29628-4 035 $a(CKB)26748618800041 035 $a(MiAaPQ)EBC7251075 035 $a(Au-PeEL)EBL7251075 035 $a(OCoLC)1380367169 035 $a(DE-He213)978-3-031-29628-4 035 $a(PPN)270619690 035 $a(EXLCZ)9926748618800041 100 $a20230518d2023 u| 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aFundamentals of Nanomechanical Resonators$b[electronic resource] /$fby Silvan Schmid, Luis Guillermo Villanueva, Michael Lee Roukes 205 $a2nd ed. 2023. 210 1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2023. 215 $a1 online resource (215 pages) 311 $a9783031296277 320 $aIncludes bibliographical references and index. 327 $aLumped-Element Model Resonators -- Continuum Mechanical Resonators -- Damping -- Transduction -- Responsivity -- Measurements and Noise. 330 $aNow in an updated second edition, this classroom-tested textbook introduces and summarizes the latest models and skills required to design and optimize nanomechanical resonators, taking a top-down approach that uses macroscopic formulas to model the devices. The authors cover the electrical and mechanical aspects of nanoelectromechanical system (NEMS) devices in six expanded and revised chapters on lumped-element model resonators, continuum mechanical resonators, damping, transduction, responsivity, and measurements and noise. The applied approach found in this book is appropriate for engineering students and researchers working with micro and nanomechanical resonators. Reviews key research on the design and fabrication of micro and nanomechanical resonators; Provides a complete set of mechanical models; Maximizes reader insight into sensing, transduction, and noise and measurements. 606 $aNanotechnology 606 $aNanoelectromechanical systems 606 $aMicrotechnology 606 $aMicroelectromechanical systems 606 $aMicroresonators (Optoelectronics) 606 $aNanoengineering 606 $aNanotechnology 606 $aNanoscale Devices 606 $aMicrosystems and MEMS 606 $aMicroresonators 615 0$aNanotechnology. 615 0$aNanoelectromechanical systems. 615 0$aMicrotechnology. 615 0$aMicroelectromechanical systems. 615 0$aMicroresonators (Optoelectronics). 615 14$aNanoengineering. 615 24$aNanotechnology. 615 24$aNanoscale Devices. 615 24$aMicrosystems and MEMS. 615 24$aMicroresonators. 676 $a620.5 700 $aSchmid$b Silvan$0762241 702 $aVillanueva$b Luis Guillermo 702 $aRoukes$b Michael Lee 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910726273403321 996 $aFundamentals of Nanomechanical Resonators$92514734 997 $aUNINA