LEADER 01622oam 2200505 450 001 9910717125603321 005 20220216111518.0 035 $a(CKB)5470000002528963 035 $a(OCoLC)844688064 035 $a(OCoLC)995470000002528963 035 $a(EXLCZ)995470000002528963 100 $a20130526j199801 ua 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 00$aSurface chemistry, microstructure, and tribological properties of cubic boron nitride films /$fShuichi Watanabe [and six others] 210 1$aCleveland, Ohio :$cNational Aeronautics and Space Administration, Lewis Research Center,$dJanuary 1998. 215 $a1 online resource (15 pages) $cillustrations 225 1 $aNASA/TM ;$v113163 300 $a"January 1998." 320 $aIncludes bibliographical references (page 5). 606 $aBoron nitrides$2nasat 606 $aMicrostructure$2nasat 606 $aThin films$2nasat 606 $aBoron nitride$2fast 606 $aThin films$2fast 615 7$aBoron nitrides. 615 7$aMicrostructure. 615 7$aThin films. 615 7$aBoron nitride. 615 7$aThin films. 700 $aWatanabe$b Shuichi$01411845 712 02$aLewis Research Center, 801 0$bOCLCE 801 1$bOCLCE 801 2$bOCLCO 801 2$bOCLCF 801 2$bOCLCQ 801 2$bGPO 906 $aBOOK 912 $a9910717125603321 996 $aSurface chemistry, microstructure, and tribological properties of cubic boron nitride films$93503941 997 $aUNINA