LEADER 01461nam 2200421I 450 001 9910713926903321 005 20201211082533.0 035 $a(CKB)5470000002506396 035 $a(OCoLC)1201195769 035 $a(EXLCZ)995470000002506396 100 $a20201021j202009 ua 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aFar-infrared dielectric functions $esilicon nitride (SiNx), silicon oxide (SiOx), and high-purity silicon (Si) /$fGiuseppe Cataldo, Edward J. Wollack 210 1$aGreenbelt, MD :$cNational Aeronautics and Space Administration, Goddard Space Flight Center,$dSeptember 2020. 215 $a1 online resource (26 pages) $ccolor illustration 225 1 $aNASA/TM ;$v20205007162 300 $a"September 2020." 320 $aIncludes bibliographical references (page 2). 517 $aFar-infrared dielectric functions 606 $aNumerical analysis$2nasat 606 $aDielectric properties$2nasat 606 $aDielectrics$2nasat 615 7$aNumerical analysis. 615 7$aDielectric properties. 615 7$aDielectrics. 700 $aCataldo$b Giuseppe$01421693 702 $aWollack$b Edward J. 712 02$aGoddard Space Flight Center, 801 0$bGPO 801 1$bGPO 906 $aBOOK 912 $a9910713926903321 996 $aFar-infrared dielectric functions$93543703 997 $aUNINA