LEADER 01336aam  2200373I  450 
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005 20160205080659.0
024 8 $aGOVPUB-C13-0ebbf1f9722a690cb53e6be2f856feba
035   $a(CKB)5470000002482109
035   $a(OCoLC)936670816
035   $a(EXLCZ)995470000002482109
100   $a20160205d1968      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aMethods of measurement for semiconductor materials, process control, and devices. /$fW. Murray Bullis
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1968.
215   $a1 online resource
225 1 $aNBS technical note ;$v472
300   $a1968.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aBullis$b W. Murray$01387657
701   $aBullis$b W. Murray$01387657
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910711391803321
996   $aMethods of measurement for semiconductor materials, process control, and devices$93437721
997   $aUNINA