LEADER 01483aam  2200385I  450 
001 9910711390603321
005 20160205080659.0
024 8 $aGOVPUB-C13-77957e31255e139b90be6b4d19f09fb4
035   $a(CKB)5470000002482121
035   $a(OCoLC)936670851
035   $a(EXLCZ)995470000002482121
100   $a20160205d1971      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aMethods of measurement for semiconductor materials, process control, and devices $equarterly report October 1 to December 31, 1970 /$fW. Murray Bullis
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1971.
215   $a1 online resource
225 1 $aNBS technical note ;$v592
300   $a1971.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aMethods of measurement for semiconductor materials, process control, and devices 
700   $aBullis$b W. Murray$01387657
701   $aBullis$b W. Murray$01387657
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910711390603321
996   $aMethods of measurement for semiconductor materials, process control, and devices$93437721
997   $aUNINA