LEADER 01515aam 2200385I 450 001 9910711389003321 005 20160205080659.0 024 8 $aGOVPUB-C13-ef911170f553e34302c5c042a1d6cd21 035 $a(CKB)5470000002482137 035 $a(OCoLC)936670937 035 $a(EXLCZ)995470000002482137 100 $a20160205d1972 ua 0 101 0 $aeng 181 $2rdacontent 182 $2rdamedia 183 $2rdacarrier 200 10$aMethods of measurement for semiconductor materials, process control, and devices quarterly report $eJuly 1 to September 30, 1971 /$fW. Murray Bullis 210 1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1972. 215 $a1 online resource 225 1 $aNBS technical note ;$v717 300 $a1972. 300 $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes. 300 $aTitle from PDF title page. 320 $aIncludes bibliographical references. 517 $aMethods of measurement for semiconductor materials, process control, and devices quarterly report 700 $aBullis$b W. Murray$01387657 701 $aBullis$b W. Murray$01387657 712 02$aUnited States.$bNational Bureau of Standards. 801 0$bNBS 801 1$bNBS 801 2$bGPO 906 $aBOOK 912 $a9910711389003321 996 $aMethods of measurement for semiconductor materials, process control, and devices quarterly report$93459274 997 $aUNINA