LEADER 01555aam  2200421I  450 
001 9910711225803321
005 20151113033703.0
024 8 $aGOVPUB-C13-e093ca83ebd4bb2b49291a9a091832f6
035   $a(CKB)5470000002481766
035   $a(OCoLC)929066437
035   $a(EXLCZ)995470000002481766
100   $a20151113d1982      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aMeasurement assurance for dimensional measurements on integrated-circuit photomasks /$fCarroll. Croarkin
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1982.
215   $a1 online resource
225 1 $aNBS technical note ;$v1164
300   $a1982.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
606   $aIntegrated circuits$xMasks$xMeasurement
606   $aOptical instruments$xCalibration
615  0$aIntegrated circuits$xMasks$xMeasurement.
615  0$aOptical instruments$xCalibration.
700   $aCroarkin$b Carroll$01411172
701   $aCroarkin$b Carroll$01411172
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910711225803321
996   $aMeasurement assurance for dimensional measurements on integrated-circuit photomasks$93501676
997   $aUNINA