LEADER 01482aam  2200421I  450 
001 9910711207003321
005 20151113033705.0
024 8 $aGOVPUB-C13-0b5eed4345f3f80263c59f745110e9d6
035   $a(CKB)5470000002481956
035   $a(OCoLC)929067615
035   $a(EXLCZ)995470000002481956
100   $a20151113d1998      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aCalibration service for laser power and energy at 248 nm /$fRodney W. Leonhardt
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1998.
215   $a1 online resource
225 1 $aNIST technical note ;$v1394
300   $a1998.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
606   $aExcimer lasers$xCalibration
606   $aLasers$xIndustrial applications
615  0$aExcimer lasers$xCalibration.
615  0$aLasers$xIndustrial applications.
700   $aLeonhardt$b Rodney W$01414514
701   $aLeonhardt$b Rodney W$01414514
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910711207003321
996   $aCalibration service for laser power and energy at 248 nm$93513970
997   $aUNINA