LEADER 01286aam  2200373I  450 
001 9910711191903321
005 20151030113009.0
024 8 $aGOVPUB-C13-abd9d289cc7e0875113fda481f20fea5
035   $a(CKB)5470000002480088
035   $a(OCoLC)927169867
035   $a(EXLCZ)995470000002480088
100   $a20151030d1993      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aEvolution of silicon materials characterization /$fW. Murray Bullis
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1993.
215   $a1 online resource
225 1 $aNIST special publication ;$v400-92
300   $a1993.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aBullis$b W. Murray$01387657
701   $aBullis$b W. Murray$01387657
712 02$aNational Institute of Standards and Technology (U.S.)
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910711191903321
996   $aEvolution of silicon materials characterization$93533055
997   $aUNINA