LEADER 01537aam  2200397I  450 
001 9910711191303321
005 20151030113009.0
024 8 $aGOVPUB-C13-a7a79a01e42cf22ce5ff8c63bd719f09
035   $a(CKB)5470000002480094
035   $a(OCoLC)927169878
035   $a(EXLCZ)995470000002480094
100   $a20151030d1995      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aSurvey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /$fW. Murray Bullis, S. Perkowitz, D. G. Seiler
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1995.
215   $a1 online resource
225 1 $aNIST special publication ;$v400-98
300   $a1995.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aBullis$b W. Murray$01387657
701   $aBullis$b W. Murray$01387657
701   $aPerkowitz$b Sidney$0727343
701   $aSeiler$b David G$053724
712 02$aNational Institute of Standards and Technology (U.S.)
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910711191303321
996   $aSurvey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry$93453180
997   $aUNINA