LEADER 01341aam  2200385I  450 
001 9910711191103321
005 20151030113009.0
024 8 $aGOVPUB-C13-973a127f89f8fa375dc7a1b95a014e73
035   $a(CKB)5470000002480096
035   $a(OCoLC)927169880
035   $a(EXLCZ)995470000002480096
100   $a20151030d1998      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aThin film reference materials development /$fBarbara J. Belzer, David L. Blackburn
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1998.
215   $a1 online resource
225 1 $aNIST special publication ;$v400-100
300   $a1998.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aBelzer$b Barbara J$01410394
701   $aBelzer$b Barbara J$01410394
701   $aBlackburn$b David L$01410395
712 02$aNational Institute of Standards and Technology (U.S.)
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910711191103321
996   $aThin film reference materials development$93498976
997   $aUNINA