LEADER 03350aam 2200517I 450 001 9910711167303321 005 20160926090654.0 024 8 $aGOVPUB-C13-e897d58723c4156c3001abd157d0ffa5 035 $a(CKB)5470000002480336 035 $a(OCoLC)958885885 035 $a(EXLCZ)995470000002480336 100 $a20160921d2016 ua 0 101 0 $aeng 181 $2rdacontent 182 $2rdamedia 183 $2rdacarrier 200 10$aMethod for measuring the diameter of polystyrene latex reference spheres by atomic force microscopy /$fJohn A. Dagata; Natalia Farkas; Prem Kavuri; Andras E. Vladar; Chung-Lin Wu; Hiroshi Itoh; Kensei Ehara 210 1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d2016. 215 $a1 online resource (33 pages) $cillustrations (color) 225 1 $aNIST special publication ;$v260-185 300 $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes. 300 $aJuly 2016. 300 $aTitle from PDF title page (viewed July 28, 2016). 320 $aIncludes bibliographical references. 330 3 $aThis report presents a correlated height and width measurement model for particle size analysis of spherical particles by atomic force microscopy (AFM). It is complementary to more familiar methods based on a single value of the particle height or on a line average obtained from a close-packed particle array. Significant influence quantities affecting the determination of average particle size and its uncertainty are considered for the important case of polystyrene latex (PSL) reference materials. Particlesubstrate deformation, resulting from adhesive contact between particle and substrate during sample preparation, is estimated as a function of particle size. Post-processing of AFM datasets is explored as a means of eliminating bias due to non-steady state measurement conditions. These biases arise from variable particle-tip interaction caused by drift of instrumental parameters from their optimal settings during long acquisition times and inevitable wear of the AFM probe. Changes of the initial probe shape are established using a Si/SiO2 multilayer tip characterizer and are updated periodically during the analysis of sequential data sets for combinations of several particles sizes and different probes. Finally, the capability of this procedure to serve as a statistical error-correction scheme in AFM particle-size metrology is assessed. 606 $aAtomic force microscopy 606 $aPolystyrene 615 0$aAtomic force microscopy. 615 0$aPolystyrene. 700 $aDagata$b John A$01389048 701 $aDagata$b John A$01389048 701 $aEhara$b Kensei$01389049 701 $aFarkas$b Natalia$01389050 701 $aItoh$b Hiroshi$01389051 701 $aKavuri$b Prem$01389052 701 $aVlada?r$b Andra?s E$01389053 701 $aWu$b Zhonglin$01389054 712 02$aPhysical Measurement Laboratory (National Institute of Standards and Technology (U.S.)) 801 0$bNBS 801 1$bNBS 801 2$bGPO 801 2$bNBS 906 $aBOOK 912 $a9910711167303321 996 $aMethod for measuring the diameter of polystyrene latex reference spheres by atomic force microscopy$93440167 997 $aUNINA