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035   $a(CKB)5470000002478558
035   $a(OCoLC)947047598
035   $a(EXLCZ)995470000002478558
100   $a20160421d2004      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aShape-sensitive linewidth measurements of resist structures $eLITG410I project /$fJohn S. Villarrubia; Andras E. Vladar; Michael T. Postek
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d2004.
215   $a1 online resource
225 1 $aNISTIR ;$v7089
300   $a2004.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aShape-sensitive linewidth measurements of resist structures 
700   $aVillarrubia$b John S$01410674
701   $aPostek$b Michael T$01410675
701   $aVillarrubia$b John S$01410674
701   $aVlada?r$b Andra?s E$01389053
712 02$aNational Institute of Standards and Technology (U.S.)
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710774703321
996   $aShape-sensitive linewidth measurements of resist structures$93499843
997   $aUNINA