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035   $a(OCoLC)947047636
035   $a(EXLCZ)995470000002478575
100   $a20160421d2005      ua         0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aMaterials Science and Engineering Laboratory $eNanometrology FY 2004/2005 projects /$fClare Allocca; Stephen Freiman
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d2005.
215   $a1 online resource
225 1 $aNISTIR ;$v7130
300   $a2005.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aMaterials Science and Engineering Laboratory
700   $aAllocca$b Clare$01410676
701   $aAllocca$b Clare$01410676
701   $aFreiman$b S. W$0861320
712 02$aNational Institute of Standards and Technology (U.S.)
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710773003321
996   $aMaterials Science and Engineering Laboratory$94190353
997   $aUNINA