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005 20160426110459.0
024 8 $aGOVPUB-C13-581e46f683ff51691c924891b61e54d4
035   $a(CKB)5470000002477425
035   $a(OCoLC)947843819
035   $a(EXLCZ)995470000002477425
100   $a20160426d1984      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aRADC/NBS workshop moisture measurement and control for semiconductor devices, III $eproceedings of the RADC/ NBS workshop held at the National Bureau of Standards Gaithersburg, MD November 2-4, 1983 /$fBenjamin A. Moore; Stanley Ruthberg
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1984.
215   $a1 online resource
225 1 $aNBSIR ;$v84-2852
300   $a1984.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aRADC/NBS workshop moisture measurement and control for semiconductor devices, III 
700   $aMoore$b Benjamin A$01404222
701   $aMoore$b Benjamin A$01404222
701   $aRuthberg$b Stanley$01403333
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710586803321
996   $aRADC$93478467
997   $aUNINA