LEADER 01310aam  2200373I  450 
001 9910710566603321
005 20160426110502.0
024 8 $aGOVPUB-C13-cf6ba60967ec192bf765e2c52104e975
035   $a(CKB)5470000002477629
035   $a(OCoLC)947844119
035   $a(EXLCZ)995470000002477629
100   $a20160426d1985      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aUltraclean semiconductor processing laboratory safe operating procedures manual /$fG. P. Carver
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1985.
215   $a1 online resource
225 1 $aNBSIR ;$v85-3149
300   $a1985.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aCarver$b G. P$01385516
701   $aCarver$b G. P$01385516
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710566603321
996   $aUltraclean semiconductor processing laboratory safe operating procedures manual$93438603
997   $aUNINA