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024 8 $aGOVPUB-C13-6c392f7831163d780640a7a1e7b214ad
035   $a(CKB)5470000002477784
035   $a(OCoLC)951215411
035   $a(EXLCZ)995470000002477784
100   $a20160606d1986      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aSemiconductor measurement technology $ea bibliography of NBS publications for the years 1962-1985 /$fJane Walters
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1986.
215   $a1 online resource
225 1 $aNBSIR ;$v86-3464
300   $a1986.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aSemiconductor measurement technology 
700   $aWalters$b Jane$01405223
701   $aWalters$b Jane$01405223
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710551303321
996   $aSemiconductor measurement technology$93504030
997   $aUNINA