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035   $a(CKB)5470000002477915
035   $a(OCoLC)951907069
035   $a(EXLCZ)995470000002477915
100   $a20160620d1987      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aRADC/NBS international workshop moisture measurement and control for microelectronics (IV) $eproceedings of the RADC/NBS workshop held at the National Bureau of Standards Gaithersburg, MD November 12-14, 1986 /$fDidier Kane; Benjamin A. Moore; W. Janes Walters
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1987.
215   $a1 online resource
225 1 $aNBSIR ;$v87-3588
300   $a1987.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aRADC/NBS international workshop moisture measurement and control for microelectronics 
700   $aKane$b Didier$01419153
701   $aKane$b Didier$01419153
701   $aMoore$b Benjamin A$01404222
701   $aWalters$b W. Janes$01419154
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710538303321
996   $aRADC$93532752
997   $aUNINA