LEADER 02168aam  2200565I  450 
001 9910710526603321
005 20160922100248.0
024 8 $aGOVPUB-C13-ca35345bfea3d3aec3f3924a80a0e934
035   $a(CKB)5470000002478033
035   $a(OCoLC)958933663
035   $a(EXLCZ)995470000002478033
100   $a20160922d2002      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aNanomanufacturing of atom-based dimensional standards $ea final project report of the national advanced manufacturing testbed /$fT.V. Vorburger; R.H. Allen; B. Damazo; J. Fu; D. Monk; M. Osti; J. Pellegrino; R. Rhorer; R. Russell; R. Silver; R. Sriram; K. Stouffer; D. A. Swyt; E. C. Teague; T. Wheatley; D. Wilmering
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d2002.
215   $a1 online resource
225 1 $aNISTIR ;$v6850
300   $a2002.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aNanomanufacturing of atom-based dimensional standards 
700   $aVorburger$b T. V$g(Theodore V.)$01389846
701   $aAllen$b R. H$01401552
701   $aDamazo$b B$01401553
701   $aFu$b J$01401554
701   $aMonk$b D$01401555
701   $aOsti$b M$01401556
701   $aPellegrino$b J$01401557
701   $aRhorer$b R$01401558
701   $aRussell$b R$0421138
701   $aSilver$b R$01401559
701   $aSriram$b R$01401560
701   $aStouffer$b K$01401561
701   $aSwyt$b D. A$01401562
701   $aTeague$b E. C$01389851
701   $aVorburger$b T. V$g(Theodore V.)$01389846
701   $aWheatley$b T$01401563
701   $aWilmering$b D$01401564
712 02$aNational Institute of Standards and Technology (U.S.)
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710526603321
996   $aNanomanufacturing of atom-based dimensional standards$93470356
997   $aUNINA