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200 00$aMethod for measuring axis orthogonality in MEMS accelerometers /$fCraig D. McGray; Yaqub Afridi; Jon Geist
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d2013.
215   $a1 online resource (11 pages) $cillustrations (some color)
225 1 $aNISTIR ;$v7925
300   $a"July 2013."
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page (viewed July 16, 2013).
320   $aIncludes bibliographical references.
606   $aAccelerometers
606   $aAxis orthogonality
615  0$aAccelerometers.
615  0$aAxis orthogonality.
700   $aMcGray$b Craig D$01394935
701   $aAfridi$b Yaqub$01394936
701   $aGeist$b Jon$01392974
701   $aMcGray$b Craig D$01394935
712 02$aNational Institute of Standards and Technology (U.S.).$bSemiconductor and Dimensional Division, Physical Measurement Laboratory.
801  0$bNBS
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906   $aBOOK
912   $a9910710519203321
996   $aMethod for measuring axis orthogonality in MEMS accelerometers$93452794
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