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005 20151118015331.0
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035   $a(CKB)5470000002476310
035   $a(OCoLC)929883663
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100   $a20151118d1978      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aSemiconductor technology program $eprogress briefs /$fW. Murray Bullis
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1978.
215   $a1 online resource
225 1 $aNBSIR ;$v78-1444-3
300   $a1978.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aSemiconductor technology program 
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701   $aBullis$b W. Murray$01387657
712 02$aUnited States.$bNational Bureau of Standards.
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997   $aUNINA