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100   $a20160309d1980      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
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200 10$aSemiconductor technology program $eprogress briefs /$fW. Murray Bullis
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1980.
215   $a1 online resource
225 1 $aNBSIR ;$v80-2006-2
300   $a1980.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aSemiconductor technology program 
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