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100   $a20160309d1980      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 14$aThe NBS semiconductor technology program and VLSI /$fW. Murray Bullis; R. I. Scace
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1980.
215   $a1 online resource
225 1 $aNBSIR ;$v80-2057
300   $a1980.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aBullis$b W. Murray$01387657
701   $aBullis$b W. Murray$01387657
701   $aScace$b R. I$01402673
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710232703321
996   $aThe NBS semiconductor technology program and VLSI$93473637
997   $aUNINA