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035   $a(CKB)5470000002477068
035   $a(OCoLC)944188170
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100   $a20160309d1981      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aSemiconductor technology program $eprogress briefs /$fW. Murray Bullis
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1981.
215   $a1 online resource
225 1 $aNBSIR ;$v81-2230-2
300   $a1981.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aSemiconductor technology program 
700   $aBullis$b W. Murray$01387657
701   $aBullis$b W. Murray$01387657
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
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801  2$bGPO
906   $aBOOK
912   $a9910710222203321
996   $aSemiconductor technology program$93452709
997   $aUNINA