LEADER 01243aam  2200373I  450 
001 9910710217903321
005 20160318082755.0
024 8 $aGOVPUB-C13-294471c2bef333b136763fa9a94453aa
035   $a(CKB)5470000002477111
035   $a(OCoLC)945070608
035   $a(EXLCZ)995470000002477111
100   $a20160318d1982      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aAnalysis of oxide and oxide/matrix interfaces in silicon nitride /$fNancy J. Tighe
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1982.
215   $a1 online resource
225 1 $aNBSIR ;$v82-2574
300   $a1982.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aTighe$b N. J$01387899
701   $aTighe$b N. J$01387899
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710217903321
996   $aAnalysis of oxide and oxide$93478478
997   $aUNINA