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001 9910710213403321
005 20160318082757.0
024 8 $aGOVPUB-C13-ffcb243bd6597da24933ef11f58bb860
035   $a(CKB)5470000002477157
035   $a(OCoLC)945070759
035   $a(EXLCZ)995470000002477157
100   $a20160318d1983      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aSemiconductor technology program $eprogress briefs /$fE. J. Walters
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1983.
215   $a1 online resource
225 1 $aNBSIR ;$v82-2636
300   $a1983.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aSemiconductor technology program 
700   $aWalters$b E. Jane$01390287
701   $aWalters$b E. Jane$01390287
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910710213403321
996   $aSemiconductor technology program$93536885
997   $aUNINA