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001 9910709941103321
005 20180711120937.0
024 8 $aGOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6
035   $a(CKB)5470000002474857
035   $a(OCoLC)124075057
035   $a(OCoLC)995470000002474857
035   $a(EXLCZ)995470000002474857
100   $a20070509d2005      ua             0
101 0 $aeng
135   $aurcn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 02$aA Framework for standard modular simulation $eapplication to semiconductor wafer fabrication /$fHeshan Li [and others]
210  1$a[Gaithersburg, MD] :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d[2005].
215   $a1 online resource (17 pages) $cillustrations
225 1 $aNISTIR ;$v7236
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from page 1, viewed April 6, 2007.
320   $aIncludes bibliographical references.
517   $aFramework for standard modular simulation 
606   $aSemiconductor wafers$xStandards
615  0$aSemiconductor wafers$xStandards.
701   $aFernandez$b Emmanuel$01417714
701   $aLeong$b Swee K$01417715
701   $aLi$b Heshan$01417716
701   $aMcLean$b Charles R$g(Charles Robert)$01394916
701   $aRamirez-Hernandez$b Jose A$01417717
712 02$aNational Institute of Standards and Technology (U.S.)
801  0$bNBS
801  1$bNBS
801  2$bOCLCQ
801  2$bOCLCO
801  2$bOCLCQ
906   $aBOOK
912   $a9910709941103321
996   $aA Framework for standard modular simulation$93527059
997   $aUNINA