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005 20151118015316.0
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035   $a(CKB)5470000002475032
035   $a(OCoLC)929878490
035   $a(EXLCZ)995470000002475032
100   $a20151118d1978      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aControl of mobile-ion contamination in oxidation ambients for MOS device processing /$fSantos Mayo; Richard Y. Koyama; Thomas F. Leedy
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1978.
215   $a1 online resource
225 1 $aNBSIR ;$v77-1404
300   $a1978.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aMayo$b Santos$01407760
701   $aKoyama$b Richard Y$01417738
701   $aLeedy$b Thomas F$01417739
701   $aMayo$b Santos$01407760
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709923703321
996   $aControl of mobile-ion contamination in oxidation ambients for MOS device processing$93527145
997   $aUNINA