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005 20151118015317.0
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101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aSemiconductor technology program $eprogress briefs /$fW. Murray Bullis
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1979.
215   $a1 online resource
225 1 $aNBSIR ;$v79-1591-1
300   $a1979.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aSemiconductor technology program 
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