LEADER 01456aam  2200409I  450 
001 9910709907503321
005 20151118015318.0
024 8 $aGOVPUB-C13-46650f1ab275db56adeb6afb3a1077ef
035   $a(CKB)5470000002475196
035   $a(OCoLC)929879347
035   $a(EXLCZ)995470000002475196
100   $a20151118d1979      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aLoose-particle detection in microelectronic devices /$fJohn S. Hilten; Paul S. Lederer; J. Franklin Mayo-Wells; Carol F. Vezzetti
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1979.
215   $a1 online resource
225 1 $aNBSIR ;$v78-1590
300   $a1979.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aHilten$b John S$01392916
701   $aHilten$b John S$01392916
701   $aLederer$b Paul S$01392917
701   $aMayo-Wells$b J. Franklin$01390793
701   $aVezzetti$b Carol F$01388407
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709907503321
996   $aLoose-particle detection in microelectronic devices$93448450
997   $aUNINA