LEADER 01833nam 2200457I 450 001 9910709627303321 005 20180611090616.0 035 $a(CKB)5470000002471966 035 $a(OCoLC)1039718360 035 $a(EXLCZ)995470000002471966 100 $a20180611d2011 ua 0 101 0 $aeng 135 $aurmn||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aUnknown gases generated from a silicon wafer grinding filtration process - Colorado /$fSrinivas Durgam, Robert Streicher 210 1$aCincinnati, OH :$cU.S. Department of Health and Human Services, Centers for Disease Control and Prevention, National Institute for Occupational Safety and Health,$d2011. 215 $a1 online resource (iv, 25 pages) $cillustrations (some color) 225 1 $aHealth hazard evaluation report ;$vHETA 2008-0045-3145 300 $a"November 2011." 320 $aIncludes bibliographical references. 606 $aSemiconductor industry$xEmployees$xHealth and hygiene$zColorado 606 $aIndustrial hygiene$zColorado 606 $aStorage tanks$zColorado 606 $aCarbon monoxide$xThreshold limit values$zColorado 606 $aFilters and filtration$zColorado 615 0$aSemiconductor industry$xEmployees$xHealth and hygiene 615 0$aIndustrial hygiene 615 0$aStorage tanks 615 0$aCarbon monoxide$xThreshold limit values 615 0$aFilters and filtration 700 $aDurgam$b Srinivas$01393353 702 $aStreicher$b Robert 712 02$aNational Institute for Occupational Safety and Health, 801 0$bGPO 801 1$bGPO 906 $aBOOK 912 $a9910709627303321 996 $aUnknown gases generated from a silicon wafer grinding filtration process - Colorado$93449384 997 $aUNINA