LEADER 01807aam  2200457I  450 
001 9910709585603321
005 20130219020908.0
024 8 $aGOVPUB-C13-0ec92f2f2715db0c34a7586a1aa6bc62
035   $a(CKB)5470000002479142
035   $a(OCoLC)828010227
035   $a(EXLCZ)995470000002479142
100   $a20130219d2013      ua             0
101 0 $aeng
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aStandard Reference Materials(R) User's Guide for RM 8096 and 8097 $eThe MEMS 5-in-1, 2013 Edition /$fJanet M. Cassard ... [and others]
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d2013.
215   $a1 online resource (224 pages) $cillustrations (color)
225 1 $aNIST special publication ;$v260-177
300   $a"February 2013."
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page (viewed February 15, 2013).
320   $aIncludes bibliographical references.
517   $aStandard Reference Materials
606   $aPhysical measurements
615  0$aPhysical measurements.
701   $aCassard$b Janet M$01414129
701   $aGaitan$b Michael$01414130
701   $aGeist$b Jon$01392974
701   $aRead$b D. T$01388201
701   $aSeiler$b David G$053724
701   $aVorburger$b Theodore V$01414131
712 02$aNational Institute of Standards and Technology (U.S.).$bPhysical Measurement Laboratory, Material Measurement Laboratory.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709585603321
996   $aStandard Reference Materials(R) User's Guide for RM 8096 and 8097$93512390
997   $aUNINA