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100   $a20151026d1970      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aSilicon device processing /$fCharles P. Marsden
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1970.
215   $a1 online resource
225 1 $aNBS special publication ;$v337
300   $a1970.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
606   $aSilicon$vCongresses
608   $aConference papers and proceedings.$2lcgft
615  0$aSilicon
700   $aMarsden$b Charles P$01395396
701   $aMarsden$b Charles P$01395396
712 02$aUnited States.$bNational Bureau of Standards.
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996   $aSilicon device processing$93453857
997   $aUNINA