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005 20151030113005.0
024 8 $aGOVPUB-C13-6888ce4112861e4746c7dee4990e3740
035   $a(CKB)5470000002479942
035   $a(OCoLC)927169339
035   $a(EXLCZ)995470000002479942
100   $a20151030d1977      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aTechniques for measuring the integrity of passivation overcoats on integrated circuits /$fWerner Kern, Robert B. Comizzoli
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1977.
215   $a1 online resource
225 1 $aNBS special publication ;$v400-31
300   $a1977.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aKern$b Werner$016754
701   $aComizzoli$b Robert B$01413006
701   $aKern$b Werner$016754
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709506403321
996   $aTechniques for measuring the integrity of passivation overcoats on integrated circuits$93508302
997   $aUNINA