LEADER 01300aam  2200373I  450 
001 9910709506203321
005 20151030113005.0
024 8 $aGOVPUB-C13-1f14cc0c57f9e71de1cb065885fe8386
035   $a(CKB)5470000002479944
035   $a(OCoLC)927169509
035   $a(EXLCZ)995470000002479944
100   $a20151030d1980      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aAccurate linewidth measurements on integrated-circuit photomasks /$fJohn M. Jerke
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1980.
215   $a1 online resource
225 1 $aNBS special publication ;$v400-43
300   $a1980.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aJerke$b John M$01408121
701   $aJerke$b John M$01408121
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709506203321
996   $aAccurate linewidth measurements on integrated-circuit photomasks$93542776
997   $aUNINA