LEADER 01469aam  2200397I  450 
001 9910709504903321
005 20151030113006.0
024 8 $aGOVPUB-C13-030182d2a321d023d36c20ba7cdecd97
035   $a(CKB)5470000002479957
035   $a(OCoLC)927169558
035   $a(EXLCZ)995470000002479957
100   $a20151030d1982      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aInterlaboratory study on linewidth measurements for antireflective chromium photomasks /$fJohn M. Jerke, M. Carroll Croarkin, Ruth N. Varner
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1982.
215   $a1 online resource
225 1 $aNBS special publication ;$v400-74
300   $a1982.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aJerke$b John M$01408121
701   $aCroarkin$b M. Carroll$01408122
701   $aJerke$b John M$01408121
701   $aVarner$b Ruth N$01388408
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709504903321
996   $aInterlaboratory study on linewidth measurements for antireflective chromium photomasks$93491242
997   $aUNINA