LEADER 01397aam  2200385I  450 
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005 20151030113006.0
024 8 $aGOVPUB-C13-4a5de3150f56866892dbe9c0d1438d3e
035   $a(CKB)5470000002479958
035   $a(OCoLC)927169342
035   $a(EXLCZ)995470000002479958
100   $a20151030d1983      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 12$aA FORTRAN program for analysis of data from microelectronic test structures /$fRichard L. Mattis, Martin G. Buehler
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1983.
215   $a1 online resource
225 1 $aNBS special publication ;$v400-75
300   $a1983.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aMattis$b Richard L$01390315
701   $aBuehler$b Martin G$01401144
701   $aMattis$b Richard L$01390315
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709504803321
996   $aA FORTRAN program for analysis of data from microelectronic test structures$93490060
997   $aUNINA