LEADER 01286aam  2200373I  450 
001 9910709504503321
005 20151030113006.0
024 8 $aGOVPUB-C13-f9865e8a4cd70498e2a6baeb75ac09bc
035   $a(CKB)5470000002479961
035   $a(OCoLC)927169561
035   $a(EXLCZ)995470000002479961
100   $a20151030d1986      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aAnalytic analysis of ellipsometric errors /$fDeane Chandler-Horowitz
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1986.
215   $a1 online resource
225 1 $aNBS special publication ;$v400-78
300   $a1986.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aChandler-Horowitz$b Deane$01391515
701   $aChandler-Horowitz$b Deane$01391515
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709504503321
996   $aAnalytic analysis of ellipsometric errors$93542774
997   $aUNINA