LEADER 01438nam  2200409I  450 
001 9910707715003321
005 20161121132620.0
035   $a(CKB)5470000002467402
035   $a(OCoLC)963855684
035   $a(EXLCZ)995470000002467402
100   $a20161121d2016      ua             0
101 0 $aeng
135   $aurmn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 12$aA novel vacuum packaging design process for microelectromechanical system (MEMS) quad-mass gyroscopes /$fby Rohan Deshmukh, Ryan Knight and Dr William Nothwang
210  1$aAdelphi, MD :$cUS Army Research Laboratory,$d2016.
215   $a1 online resource (vi, 38 pages) $ccolor illustrations
225 1 $aARL-TR ;$v7825
300   $a"Sep 2016."
320   $aIncludes bibliographical references (pages 34-35).
517   $aNovel vacuum packaging design process for microelectromechanical system 
606   $aGyroscopes
606   $aHermetic sealing
615  0$aGyroscopes.
615  0$aHermetic sealing.
700   $aDeshmukh$b Rohan$01421414
702   $aKnight$b Ryan
702   $aNothwang$b William
712 02$aU.S. Army Research Laboratory,
801  0$bGPO
801  1$bGPO
906   $aBOOK
912   $a9910707715003321
996   $aA novel vacuum packaging design process for microelectromechanical system (MEMS) quad-mass gyroscopes$93542629
997   $aUNINA