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200 00$aMetallic oxynitride thin films by reactive sputtering and related deposition methods $eprocesses, properties and applications /$fedited by Filipe Vaz, Nicolas Martin & Martin Fenker
210  1$aSharjah, United Arab Emirates ;$aOak Park, Illinois :$cBentham Science Publishers,$d[2013]
210  4$dİ2013
215   $a1 online resource (363 p.)
300   $aDescription based upon print version of record.
311   $a1-60805-157-9 
320   $aIncludes bibliographical references and indexes.
327   $aCover; Title; Contents; About the Editors; Foreword; Preface; List of Contributors; Part 1; Chapter 01; Chapter 02; Chapter 03; Part 2; Chapter 04; Chapter 05; Chapter 06; Chapter 07; Chapter 08; Part 3; Chapter 09; Chapter 10; Chapter 11; Chapter 12; Author index; Subject index
330   $aThis e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.
606   $aThin films
606   $aMetals
608   $aElectronic books.
615  0$aThin films.
615  0$aMetals.
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200 10$aQuadrennial Energy Review and related discussion drafts $ehearing before the Subcommittee on Energy and Power of the Committee on Energy and Commerce, House of Representatives, One Hundred Fourteenth Congress, first session, June 2, 2015
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