LEADER 01574nam  2200457I  450 
001 9910707002903321
005 20160420145631.0
035   $a(CKB)5470000002461464
035   $a(OCoLC)947005053
035   $a(EXLCZ)995470000002461464
100   $a20160420j201506    ua             0
101 0 $aeng
135   $aurcn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aIntegration of nanostructures into microsensor devices on whole wafers /$fAzlin M. Biaggi-Labiosa [and three others]
210  1$aCleveland, Ohio :$cNational Aeronautics and Space Administration, Glenn Research Center,$dJune 2015.
215   $a1 online resource (14 pages) $ccolor illustrations
225 1 $aNASA/TM ;$v2015-218826
300   $aTitle from title screen (viewed on April 20, 2016).
300   $a"June 2015."
320   $aIncludes bibliographical references (pages 12-14).
606   $aMicroinstrumentation$2nasat
606   $aMicrostructure$2nasat
606   $aNanostructures (devices)$2nasat
606   $aNanowires$2nasat
606   $aSensors$2nasat
615  7$aMicroinstrumentation.
615  7$aMicrostructure.
615  7$aNanostructures (devices)
615  7$aNanowires.
615  7$aSensors.
700   $aBiaggi-Labiosa$b Azlin M.$01409485
712 02$aNASA Glenn Research Center,
801  0$bGPO
801  1$bGPO
906   $aBOOK
912   $a9910707002903321
996   $aIntegration of nanostructures into microsensor devices on whole wafers$93496012
997   $aUNINA