LEADER 01483nam  2200409I  450 
001 9910703951903321
005 20150930105552.0
035   $a(CKB)5470000002436222
035   $a(OCoLC)922579784
035   $a(EXLCZ)995470000002436222
100   $a20150930j201409    ua             0
101 0 $aeng
135   $aurcn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aDesign and fabrication of a strain-powered microelectromechanical system (MEMS) switch /$fCory R Knick and Christopher J Morris
210  1$aAdelphi, MD :$cArmy Research Laboratory,$dSeptember 2014.
215   $a1 online resource (v, 25 pages) $ccolor illustrations
225 1 $aARL-TR ;$v7095
300   $aTitle from title screen (viewed Sept. 30, 2015).
300   $a"September 2014."
320   $aIncludes bibliographical references (pages 14-15).
517   $aDesign and fabrication of a strain-powered microelectromechanical system 
606   $aMicroelectromechanical systems
606   $aMicrofabrication
615  0$aMicroelectromechanical systems.
615  0$aMicrofabrication.
700   $aKnick$b Cory R.$01418596
702   $aMorris$b Christopher J.
712 02$aU.S. Army Research Laboratory,
801  0$bGPO
801  1$bGPO
906   $aBOOK
912   $a9910703951903321
996   $aDesign and fabrication of a strain-powered microelectromechanical system (MEMS) switch$93530471
997   $aUNINA