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001 9910701473803321
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035   $a(CKB)5470000002418337
035   $a(OCoLC)227954836
035   $a(EXLCZ)995470000002418337
100   $a20080513d2007      ua             0
101 0 $aeng
135   $aurbn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aSurface analysis of reactive ion etched PZT thin films in SF6 plasma$b[electronic resource] /$fEugene Zakar
210  1$aAdelphi, MD :$cArmy Research Laboratory,$d[2007]
215   $a1 online resource (iv, 10 pages) $cillustrations
225 1 $aARL-TR ;$v4284
300   $aTitle from title screen (viewed on Feb. 23, 2012).
300   $a"September 2007."
320   $aIncludes bibliographical references (pages 8-9).
606   $aSurfaces (Technology)$xAnalysis
606   $aThin films
606   $aPiezoelectricity
615  0$aSurfaces (Technology)$xAnalysis.
615  0$aThin films.
615  0$aPiezoelectricity.
700   $aZakar$b Eugene$01387268
712 02$aU.S. Army Research Laboratory.
801  0$bDTICE
801  1$bDTICE
801  2$bOCLCQ
801  2$bGPO
906   $aBOOK
912   $a9910701473803321
996   $aSurface analysis of reactive ion etched PZT thin films in SF6 plasma$93436893
997   $aUNINA